The application of RESCUER software in effective MEMS design and simulation (Q1596530)
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scientific article; zbMATH DE number 1743947
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| English | The application of RESCUER software in effective MEMS design and simulation |
scientific article; zbMATH DE number 1743947 |
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The application of RESCUER software in effective MEMS design and simulation (English)
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2 July 2002
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