Dynamical characteristics of an electrically actuated microbeam under the effects of squeeze-film and thermoelastic damping (Q1621786)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Dynamical characteristics of an electrically actuated microbeam under the effects of squeeze-film and thermoelastic damping |
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Dynamical characteristics of an electrically actuated microbeam under the effects of squeeze-film and thermoelastic damping (English)
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12 November 2018
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mems
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microbeams
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squeeze-film damping
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thermoelastic damping
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multiphysics
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