Static characterization and pull-in voltage of a micro-switch under both electrostatic and piezoelectric excitations (Q1669371)
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English | Static characterization and pull-in voltage of a micro-switch under both electrostatic and piezoelectric excitations |
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Static characterization and pull-in voltage of a micro-switch under both electrostatic and piezoelectric excitations (English)
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3 September 2018
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MEMS
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nonlinear analysis
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pull-in voltage
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