Flatness-based adaptive fuzzy control of electrostatically actuated MEMS using output feedback (Q1677870)
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English | Flatness-based adaptive fuzzy control of electrostatically actuated MEMS using output feedback |
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Flatness-based adaptive fuzzy control of electrostatically actuated MEMS using output feedback (English)
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13 November 2017
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electrostatically actuated MEMS
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adaptive fuzzy control
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neurofuzzy approximation
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state observers
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Lyapunov stability
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\(H_\infty\) tracking performance
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Riccati equations
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