Integrating optical force sensing with visual servoing for microassembly (Q1857327)

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Integrating optical force sensing with visual servoing for microassembly
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    Integrating optical force sensing with visual servoing for microassembly (English)
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    17 February 2003
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    atomic force microscopy
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    force sensor
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    force control
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    microassembly
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    micromanipulation
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    nanomanipulation
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    sensor fusion
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    sensor integration
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    visual servoing
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