On the determination of dopant-concentration profiles by grazing emission X-ray fluorescence spectroscopy using the maximum-entropy method (Q1861663)
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scientific article; zbMATH DE number 1878777
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| English | On the determination of dopant-concentration profiles by grazing emission X-ray fluorescence spectroscopy using the maximum-entropy method |
scientific article; zbMATH DE number 1878777 |
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On the determination of dopant-concentration profiles by grazing emission X-ray fluorescence spectroscopy using the maximum-entropy method (English)
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10 March 2003
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inverse Laplace transform
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maximum entropy
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semiconductors
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spectroscopy
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X-ray fluorescence
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0.6933822631835938
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0.6822166442871094
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