Quantum dynamics effects on amplitude-frequency response of superharmonic resonance of second-order of electrostatically actuated NEMS circular plates (Q2080382)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Quantum dynamics effects on amplitude-frequency response of superharmonic resonance of second-order of electrostatically actuated NEMS circular plates |
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Quantum dynamics effects on amplitude-frequency response of superharmonic resonance of second-order of electrostatically actuated NEMS circular plates (English)
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7 October 2022
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MEMS
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NEMS
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nonlinear
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amplitude-frequency response
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superharmonic
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resonance of second-order
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circular plate resonators
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Casimir effect
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van der Waals effect
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