Mathematical modeling of MEMS elements subjected to external forces, temperature and noise, taking account of coupling of temperature and deformation fields as well as a nonhomogenous material structure (Q2207340)

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scientific article; zbMATH DE number 7264728
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    Mathematical modeling of MEMS elements subjected to external forces, temperature and noise, taking account of coupling of temperature and deformation fields as well as a nonhomogenous material structure
    scientific article; zbMATH DE number 7264728

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      Mathematical modeling of MEMS elements subjected to external forces, temperature and noise, taking account of coupling of temperature and deformation fields as well as a nonhomogenous material structure (English)
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      22 October 2020
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      MEMS
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      temperature
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      deformation
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      noise
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