Modeling reactive magnetron sputtering: a survey of different modeling approaches (Q2220239)
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scientific article; zbMATH DE number 7300113
| Language | Label | Description | Also known as |
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| default for all languages | No label defined |
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| English | Modeling reactive magnetron sputtering: a survey of different modeling approaches |
scientific article; zbMATH DE number 7300113 |
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Modeling reactive magnetron sputtering: a survey of different modeling approaches (English)
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22 January 2021
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mathematical modeling
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parameter identification
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control theory
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computer simulation
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reactive magnetron sputtering
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0.6367772221565247
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0.6237682104110718
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0.6187033653259277
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0.6130642294883728
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