Modeling reactive magnetron sputtering: a survey of different modeling approaches (Q2220239)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Modeling reactive magnetron sputtering: a survey of different modeling approaches |
scientific article; zbMATH DE number 7300113
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
||
| English | Modeling reactive magnetron sputtering: a survey of different modeling approaches |
scientific article; zbMATH DE number 7300113 |
Statements
Modeling reactive magnetron sputtering: a survey of different modeling approaches (English)
0 references
22 January 2021
0 references
mathematical modeling
0 references
parameter identification
0 references
control theory
0 references
computer simulation
0 references
reactive magnetron sputtering
0 references
0.6367772221565247
0 references
0.6237682104110718
0 references
0.6187033653259277
0 references
0.6130642294883728
0 references
