Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation (Q2246959)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation |
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Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation (English)
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16 November 2021
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mode localization
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electrostatic coupling
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multiple scales method
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Euler-Bernoulli microbeam
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asymptotic harmonic balance method
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nonlinear sensitivity analysis
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