Electro-thermo-chemical computational models for 3D heterogeneous semiconductor device simulation (Q2278787)

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scientific article; zbMATH DE number 7142132
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    Electro-thermo-chemical computational models for 3D heterogeneous semiconductor device simulation
    scientific article; zbMATH DE number 7142132

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      Electro-thermo-chemical computational models for 3D heterogeneous semiconductor device simulation (English)
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      10 December 2019
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      semiconductors
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      electronic and memory devices
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      nonlinear reaction-diffusion system with convection
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      interface conditions
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      numerical simulation
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      finite element method
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