Simultaneous determination of position and mass of a particle by the vibration of a diaphragm-based nanomechanical resonator (Q2399272)

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Simultaneous determination of position and mass of a particle by the vibration of a diaphragm-based nanomechanical resonator
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    Simultaneous determination of position and mass of a particle by the vibration of a diaphragm-based nanomechanical resonator (English)
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    22 August 2017
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    mass sensor
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    diaphragm
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    residual stress
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    resonant vibration
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