Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage (Q2480951)
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English | Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage |
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Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage (English)
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7 April 2008
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input coupling
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micro-positioning stage
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finite element method
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optimal design
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