On the mathematical modelling of multidimensional ion implantation problems (Q2743250)
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scientific article; zbMATH DE number 1652032
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
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| English | On the mathematical modelling of multidimensional ion implantation problems |
scientific article; zbMATH DE number 1652032 |
Statements
8 April 2002
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computational algorithm
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ion implantation
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Monte Carlo simulation
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On the mathematical modelling of multidimensional ion implantation problems (English)
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0.7509793639183044
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0.6870374083518982
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