On the dopant distribution along the crystal length in Czochralski growth (Q2743354)
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scientific article; zbMATH DE number 1652098
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| English | On the dopant distribution along the crystal length in Czochralski growth |
scientific article; zbMATH DE number 1652098 |
Statements
25 July 2002
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On the dopant distribution along the crystal length in Czochralski growth (English)
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