Simulation of impurity diffusion during thermal annealing in the polysilicon-silicon system (Q2743487)
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scientific article; zbMATH DE number 1652199
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| English | Simulation of impurity diffusion during thermal annealing in the polysilicon-silicon system |
scientific article; zbMATH DE number 1652199 |
Statements
25 March 2002
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Simulation of impurity diffusion during thermal annealing in the polysilicon-silicon system (English)
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