Effect of Improved Tracking for Atomic Force Microscope on Piezo Nonlinear Behavior (Q2789980)
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English | Effect of Improved Tracking for Atomic Force Microscope on Piezo Nonlinear Behavior |
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Effect of Improved Tracking for Atomic Force Microscope on Piezo Nonlinear Behavior (English)
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2 March 2016
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nanotechnology
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atomic force microscope
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hysteresis
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creep
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cross-coupling
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model predictive control (MPC)
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vibration compensator
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