Lateral-flexural and torsional vibrations of flexible ring for electromechanical integrated electrostatic harmonic actuator (Q2845988)

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scientific article; zbMATH DE number 6205648
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    Lateral-flexural and torsional vibrations of flexible ring for electromechanical integrated electrostatic harmonic actuator
    scientific article; zbMATH DE number 6205648

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      5 September 2013
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      electromechanical integrated
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      actuator
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      vibration
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      MEMS
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      Lateral-flexural and torsional vibrations of flexible ring for electromechanical integrated electrostatic harmonic actuator (English)
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