On the control design and robustness analysis for high-density microcantilever arrays (Q2846333)

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On the control design and robustness analysis for high-density microcantilever arrays
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    On the control design and robustness analysis for high-density microcantilever arrays (English)
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    5 September 2013
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    AFM
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    distributed control
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    array architecture
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    atomic force microscope
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    nano
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