Numerical simulation and design of a new microwave annular waveguide plasma source-I: Simulations without the plasma parameters (Q2889644)

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Numerical simulation and design of a new microwave annular waveguide plasma source-I: Simulations without the plasma parameters
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    Numerical simulation and design of a new microwave annular waveguide plasma source-I: Simulations without the plasma parameters (English)
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    8 June 2012
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    microwave reactor
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    numerical simulation
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    electromagnetic field
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