Numerical simulation and design of a new microwave annular waveguide plasma source-I: Simulations without the plasma parameters (Q2889644)
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Language | Label | Description | Also known as |
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English | Numerical simulation and design of a new microwave annular waveguide plasma source-I: Simulations without the plasma parameters |
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Numerical simulation and design of a new microwave annular waveguide plasma source-I: Simulations without the plasma parameters (English)
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8 June 2012
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microwave reactor
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numerical simulation
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electromagnetic field
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