Numerical simulation and design of a new microwave annular waveguide plasma source. I: Simulations without the plasma parameters (Q2889644)
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scientific article; zbMATH DE number 6043706
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| English | Numerical simulation and design of a new microwave annular waveguide plasma source. I: Simulations without the plasma parameters |
scientific article; zbMATH DE number 6043706 |
Statements
8 June 2012
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microwave reactor
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numerical simulation
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electromagnetic field
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0.83892566
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0.8383095
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0.82792616
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0.8261986
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0.8259777
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0.8212434
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0.82084763
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0.82076085
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0.8168242
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Numerical simulation and design of a new microwave annular waveguide plasma source. I: Simulations without the plasma parameters (English)
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