Simulation of RF plasma flowing at low pressure (Q2961173)
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scientific article; zbMATH DE number 6687001
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
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| English | Simulation of RF plasma flowing at low pressure |
scientific article; zbMATH DE number 6687001 |
Statements
Simulation of RF plasma flowing at low pressure (English)
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17 February 2017
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mathematical modeling
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RF plasma
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low pressure
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jet streams
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transient mode
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Monte-Carlo method
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statistical modeling
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0.8785422
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0.86743855
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0.86488724
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0.86017734
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0.8573848
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0.85473716
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