On the origin and the calculation of the force in electrostatic actuators (Q3186987)

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On the origin and the calculation of the force in electrostatic actuators
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    On the origin and the calculation of the force in electrostatic actuators (English)
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    15 August 2016
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    electrostatic fields
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    electrostatic actuators
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    Maxwell stress tensor
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    comb drive
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    principle of virtual displacement
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