Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times (Q337294)
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scientific article; zbMATH DE number 6650779
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| English | Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times |
scientific article; zbMATH DE number 6650779 |
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Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times (English)
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10 November 2016
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scheduling
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cluster tools
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semiconductor manufacturing
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Petri net
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