Optimized allocation of defect inspection capacity with a dynamic sampling strategy (Q337310)
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scientific article; zbMATH DE number 6650785
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| English | Optimized allocation of defect inspection capacity with a dynamic sampling strategy |
scientific article; zbMATH DE number 6650785 |
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Optimized allocation of defect inspection capacity with a dynamic sampling strategy (English)
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10 November 2016
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semiconductor manufacturing
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linear programming
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capacity planning
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inspections
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wafers at risk
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0.7398820519447327
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0.7206897139549255
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0.7171355485916138
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0.708519697189331
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0.707086443901062
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