Analysis of the Dynamics and Touchdown in a Model of Electrostatic MEMS (Q3435021)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Analysis of the Dynamics and Touchdown in a Model of Electrostatic MEMS |
scientific article |
Statements
Analysis of the Dynamics and Touchdown in a Model of Electrostatic MEMS (English)
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3 May 2007
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microelectromechanical system
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quenching
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