Multiscale analysis of nonequilibrium rarefied gas flows with the application to silicon thin film process employing supersonic jet (Q3554397)
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| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Multiscale analysis of nonequilibrium rarefied gas flows with the application to silicon thin film process employing supersonic jet |
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Multiscale analysis of nonequilibrium rarefied gas flows with the application to silicon thin film process employing supersonic jet (English)
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22 April 2010
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silicon compounds
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rarefied fluid dynamics
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supersonic flow
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hydrogen
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jets
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flow simulation
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ab initio calculations
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Monte Carlo methods
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nonequilibrium flow
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