Multiscale analysis of nonequilibrium rarefied gas flows with the application to silicon thin film process employing supersonic jet (Q3554397)
From MaRDI portal
 | This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use this page instead for the normal view: Multiscale analysis of nonequilibrium rarefied gas flows with the application to silicon thin film process employing supersonic jet |
scientific article; zbMATH DE number 5699376
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
||
| English | Multiscale analysis of nonequilibrium rarefied gas flows with the application to silicon thin film process employing supersonic jet |
scientific article; zbMATH DE number 5699376 |
Statements
Multiscale analysis of nonequilibrium rarefied gas flows with the application to silicon thin film process employing supersonic jet (English)
0 references
22 April 2010
0 references
silicon compounds
0 references
rarefied fluid dynamics
0 references
supersonic flow
0 references
hydrogen
0 references
jets
0 references
flow simulation
0 references
ab initio calculations
0 references
Monte Carlo methods
0 references
nonequilibrium flow
0 references
0 references
0.751627504825592
0 references
0.7293232679367065
0 references
0.7154080867767334
0 references
0.7136772274971008
0 references
