Parametric Modelling of Microresonators Dynamics with Considering Thermal Effects (Q3595790)
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scientific article; zbMATH DE number 5183723
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| English | Parametric Modelling of Microresonators Dynamics with Considering Thermal Effects |
scientific article; zbMATH DE number 5183723 |
Statements
Parametric Modelling of Microresonators Dynamics with Considering Thermal Effects (English)
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28 August 2007
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MEMS dynamics
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thermoelastic
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microcantilever
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microresonators
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nonlinear modeling
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thermal damping
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thermal relaxation
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capacitive sensors
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0.8863688111305237
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0.8108044862747192
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0.7510823607444763
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0.7006692886352539
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0.6992918848991394
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