Size effect on the static behavior of electrostatically actuated microbeams (Q362909)
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scientific article; zbMATH DE number 6203199
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| English | Size effect on the static behavior of electrostatically actuated microbeams |
scientific article; zbMATH DE number 6203199 |
Statements
Size effect on the static behavior of electrostatically actuated microbeams (English)
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30 August 2013
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electrostatically actuated microbeam
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size effect
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deflection
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pull-in voltage
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MEMS
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0.9250513315200806
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0.8303512334823608
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0.8198032379150391
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0.816437840461731
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0.8151837587356567
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