Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations (Q363712)
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scientific article; zbMATH DE number 6205578
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| English | Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations |
scientific article; zbMATH DE number 6205578 |
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Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations (English)
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5 September 2013
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PVD
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glow discharge
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surface coating
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plasma
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drift-diffusion
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0.7526004910469055
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0.7490370869636536
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0.7370879650115967
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0.731317937374115
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