Digital control of interferometric metrology lines (Q397313)
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scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Digital control of interferometric metrology lines |
scientific article |
Statements
Digital control of interferometric metrology lines (English)
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12 August 2014
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digital control
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embedded model control
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Fabry-Pérot interferometry
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laser interferometry
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state predictor
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