Construction of an Asymptotic Model for the Oxidation Process of Silicon (Q4214706)

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scientific article; zbMATH DE number 1216895
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Construction of an Asymptotic Model for the Oxidation Process of Silicon
scientific article; zbMATH DE number 1216895

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    25 May 1999
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    oxidation process of silicon
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    moving mixed zone
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    asymptotic analysis
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    sharp reaction front
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    existence
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    uniqueness
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    qualitative behaviour
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    Construction of an Asymptotic Model for the Oxidation Process of Silicon (English)
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