Micron-scale channel formation by the release and Bond-back of pre-stressed thin films: a finite element analysis (Q442005)
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scientific article; zbMATH DE number 6064382
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| English | Micron-scale channel formation by the release and Bond-back of pre-stressed thin films: a finite element analysis |
scientific article; zbMATH DE number 6064382 |
Statements
Micron-scale channel formation by the release and Bond-back of pre-stressed thin films: a finite element analysis (English)
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8 August 2012
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buckle-driven delamination
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release-and-Bond-back
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thin films
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micro/nano-fluidic channels
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finite element analysis
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0.8428119
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0.8403933
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0.8391706
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0.82787305
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0.8235533
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0.8205602
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0.8203563
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0.81639445
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0.81635725
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