Grating Profile Reconstruction Based on Finite Elements and Optimization Techniques (Q4441880)

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scientific article; zbMATH DE number 2024194
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Grating Profile Reconstruction Based on Finite Elements and Optimization Techniques
scientific article; zbMATH DE number 2024194

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    Grating Profile Reconstruction Based on Finite Elements and Optimization Techniques (English)
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    8 January 2004
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    diffraction grating
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    profile reconstruction
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    optimization method
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    conjugate gradient algorithm
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