Analysis of the Air-damping Effect on a Micromachined Beam Resonator (Q4467282)
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scientific article; zbMATH DE number 2070995
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| English | Analysis of the Air-damping Effect on a Micromachined Beam Resonator |
scientific article; zbMATH DE number 2070995 |
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Analysis of the Air-damping Effect on a Micromachined Beam Resonator (English)
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9 June 2004
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