Curve evolution models for real-time identification with application to plasma etching (Q4506653)
From MaRDI portal
scientific article; zbMATH DE number 1518153
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Curve evolution models for real-time identification with application to plasma etching |
scientific article; zbMATH DE number 1518153 |
Statements
Curve evolution models for real-time identification with application to plasma etching (English)
0 references
17 October 2000
0 references
curve evolution
0 references
process modeling
0 references
real-time control
0 references
identification of free surfaces
0 references
mesh refinement
0 references
semiconductor etching
0 references
