Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system (Q4543860)
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scientific article; zbMATH DE number 1777956
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system |
scientific article; zbMATH DE number 1777956 |
Statements
Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system (English)
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11 August 2002
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practical design method
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past-error feedforward schemes
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