The dissociative diffusion mechanism with charge effects II: Two-dimensional in-diffusion (Q4650655)
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scientific article; zbMATH DE number 2134983
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | The dissociative diffusion mechanism with charge effects II: Two-dimensional in-diffusion |
scientific article; zbMATH DE number 2134983 |
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The dissociative diffusion mechanism with charge effects II: Two-dimensional in-diffusion (English)
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18 February 2005
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impurity diffusion
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semiconductors
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mask technology
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