The dissociative diffusion mechanism with charge effects II: Two-dimensional in-diffusion (Q4650655)

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scientific article; zbMATH DE number 2134983
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The dissociative diffusion mechanism with charge effects II: Two-dimensional in-diffusion
scientific article; zbMATH DE number 2134983

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    The dissociative diffusion mechanism with charge effects II: Two-dimensional in-diffusion (English)
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    18 February 2005
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    impurity diffusion
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    semiconductors
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    mask technology
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