Introduction of stochastic methods to phase-shifting interferometry (Q4654698)
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scientific article; zbMATH DE number 2143064
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| English | Introduction of stochastic methods to phase-shifting interferometry |
scientific article; zbMATH DE number 2143064 |
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Introduction of stochastic methods to phase-shifting interferometry (English)
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8 March 2005
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piezo-actuator nonlinearity
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least-squares fit
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