Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage (Q4686302)
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scientific article; zbMATH DE number 6949969
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage |
scientific article; zbMATH DE number 6949969 |
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Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage (English)
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10 October 2018
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feedforward control
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learning control
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mechatronics
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