Optimal estimation of rational feedforward control via instrumental variables: with application to a wafer stage (Q4686302)
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scientific article; zbMATH DE number 6949969
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| English | Optimal estimation of rational feedforward control via instrumental variables: with application to a wafer stage |
scientific article; zbMATH DE number 6949969 |
Statements
Optimal Estimation of Rational Feedforward Control via Instrumental Variables: With Application to a Wafer Stage (English)
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10 October 2018
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feedforward control
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learning control
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mechatronics
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0.7601134181022644
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0.7444084286689758
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0.7322484254837036
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0.7284789085388184
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