Identification of MEMS gyroscope structure using frequency response data (Q5054396)

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scientific article; zbMATH DE number 7624947
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    Identification of MEMS gyroscope structure using frequency response data
    scientific article; zbMATH DE number 7624947

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      Identification of MEMS Gyroscope Structure Using Frequency Response Data (English)
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      29 November 2022
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      system identification
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      MEMS gyroscope
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      frequency response
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      lumped parameter mechanical model
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