Virtual Sensors for Semiconductor Manufacturing: A Nonparametric Approach - Exploiting Information Theoretic Learning and Kernel Machines (Q5245446)
From MaRDI portal
scientific article; zbMATH DE number 6423487
Language | Label | Description | Also known as |
---|---|---|---|
English | Virtual Sensors for Semiconductor Manufacturing: A Nonparametric Approach - Exploiting Information Theoretic Learning and Kernel Machines |
scientific article; zbMATH DE number 6423487 |
Statements
Virtual Sensors for Semiconductor Manufacturing: A Nonparametric Approach - Exploiting Information Theoretic Learning and Kernel Machines (English)
0 references
8 April 2015
0 references
semiconductors
0 references
machine learning
0 references
entropy
0 references
kernel methods
0 references