Optimization models for semiconductor dopant profiling (Q5294091)

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scientific article; zbMATH DE number 5173856
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    Optimization models for semiconductor dopant profiling
    scientific article; zbMATH DE number 5173856

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      23 July 2007
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      doping profile
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      charge density
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      steepest descent approach
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      Gummel iteration
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      optimization problem
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      gradient-based methods
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      Newton methods
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