Nonlinear Analysis of MEMS Electrostatic Microactuators: Primary and Secondary Resonances of the First Mode* (Q5327585)
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scientific article; zbMATH DE number 6196606
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Nonlinear Analysis of MEMS Electrostatic Microactuators: Primary and Secondary Resonances of the First Mode* |
scientific article; zbMATH DE number 6196606 |
Statements
Nonlinear Analysis of MEMS Electrostatic Microactuators: Primary and Secondary Resonances of the First Mode* (English)
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8 August 2013
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microelectromechanical systems
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microactuator
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differential quadrature method
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finite difference method
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secondary resonance
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simultaneous resonance
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