Analysis of uncertainties in MEMS and their influence on dynamic properties (Q5327644)
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scientific article; zbMATH DE number 6196687
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| English | Analysis of uncertainties in MEMS and their influence on dynamic properties |
scientific article; zbMATH DE number 6196687 |
Statements
8 August 2013
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MEMS
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microresonator
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FE model
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dynamic properties
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sensitivity analysis
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uncertainty analysis
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0.7337296009063721
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0.7284319996833801
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0.7267624139785767
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0.7152263522148132
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0.7128167748451233
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