A framework for determining MIMO process parameters by a neuro-DM&ACO approach (Q5438679)
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scientific article; zbMATH DE number 5229861
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| English | A framework for determining MIMO process parameters by a neuro-DM&ACO approach |
scientific article; zbMATH DE number 5229861 |
Statements
A framework for determining MIMO process parameters by a neuro-DM&ACO approach (English)
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24 January 2008
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artificial neural network (ANN)
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ant colony optimisation (ACO)
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data mining
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chemical-mechanical planarisation (CMP)
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0.6712614893913269
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0.6621952652931213
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0.6478614807128906
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0.6468019485473633
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