Adaptive mass alteration to model ion-ion recombination in a particle-in-cell simulation of silane radio-frequency discharges (Q548981)
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scientific article; zbMATH DE number 5915774
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| English | Adaptive mass alteration to model ion-ion recombination in a particle-in-cell simulation of silane radio-frequency discharges |
scientific article; zbMATH DE number 5915774 |
Statements
Adaptive mass alteration to model ion-ion recombination in a particle-in-cell simulation of silane radio-frequency discharges (English)
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30 June 2011
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PIC method
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RF discharge
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mass alteration
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0.8490017652511597
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0.7242671251296997
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0.7225219011306763
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0.7105252146720886
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