Dynamic analysis of a micro-resonator driven by electrostatic combs (Q551140)

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Dynamic analysis of a micro-resonator driven by electrostatic combs
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    Dynamic analysis of a micro-resonator driven by electrostatic combs (English)
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    13 July 2011
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    micro-resonator
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    flexible beam
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    rigid body
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    global mode
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    orthogonality relation
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    repeated natural frequencies
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    Gram-Schmidt orthogonalization method
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    nonlinear dynamic behavior
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