Dynamic analysis of a micro-resonator driven by electrostatic combs (Q551140)
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English | Dynamic analysis of a micro-resonator driven by electrostatic combs |
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Dynamic analysis of a micro-resonator driven by electrostatic combs (English)
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13 July 2011
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micro-resonator
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flexible beam
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rigid body
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global mode
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orthogonality relation
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repeated natural frequencies
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Gram-Schmidt orthogonalization method
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nonlinear dynamic behavior
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