Bending and vibration of an electrostatically actuated circular microplate in presence of Casimir force (Q554713)

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Bending and vibration of an electrostatically actuated circular microplate in presence of Casimir force
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    Bending and vibration of an electrostatically actuated circular microplate in presence of Casimir force (English)
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    21 July 2011
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    microelectromechanical circular plate
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    pull-in instability
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    natural frequency
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    Casimir force
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    shooting method
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