Bending and vibration of an electrostatically actuated circular microplate in presence of Casimir force (Q554713)
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English | Bending and vibration of an electrostatically actuated circular microplate in presence of Casimir force |
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Bending and vibration of an electrostatically actuated circular microplate in presence of Casimir force (English)
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21 July 2011
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microelectromechanical circular plate
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pull-in instability
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natural frequency
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Casimir force
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shooting method
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