Study on the modeling method of reduced-order model for MEMS devices (Q5755310)
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scientific article; zbMATH DE number 5181059
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| default for all languages | No label defined |
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| English | Study on the modeling method of reduced-order model for MEMS devices |
scientific article; zbMATH DE number 5181059 |
Statements
20 August 2007
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micro electro-mechanical system
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mode shapes
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reduced-order models
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devices
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0.8165857791900635
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0.7611799836158752
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0.7348426580429077
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0.7329463362693787
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