A Poisson-Voronoi-based finite element stress analysis of resonating polysilicon micromachines (Q6143783)
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scientific article; zbMATH DE number 7784030
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| English | A Poisson-Voronoi-based finite element stress analysis of resonating polysilicon micromachines |
scientific article; zbMATH DE number 7784030 |
Statements
A Poisson-Voronoi-based finite element stress analysis of resonating polysilicon micromachines (English)
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5 January 2024
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material damping
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Poisson-Voronoi diagram
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local inhomogeneity
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anisotropy
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polycrystalline microstructure
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probabilistic stress analysis
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0.6906495690345764
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0.6807500123977661
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0.678617537021637
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0.6714617609977722
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